通知公告 - 正文
T/CASAS 025—2023《8英寸碳化硅衬底片基准标记及尺寸》等3项团体标准正式发布 2023-06-19 16:08
由山东大学牵头制定,遵循CASAS标准制定流程,经过标准起草小组会议讨论、广泛征求意见、委员会草案投票等流程,团体标准T/CASAS 025—2023《8英寸碳化硅衬底片基准标记及尺寸》、T/CASAS 026—2023《碳化硅少数载流子寿命测定 微波光电导衰减法》、T/CASAS 032—2023《碳化硅晶片表面金属元素含量的测定电感耦合等离子体质谱法》于2023年6月19日正式面向产业发布。
![](data:image/png;base64,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)
T/CASAS 025—2023《8英寸碳化硅衬底片基准标记及尺寸》规定了8英寸碳化硅衬底片基准标记及尺寸,适用于碳化硅切割片、研磨片和抛光片。
【本文件主要起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、绍兴中芯集成电路制造股份有限公司、泰科天润半导体科技(北京)有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
崔潆心、杨祥龙、陈秀芳、徐现刚、来玲玲、于国建、冯淦、丁雄杰、潘国卫、秋琪、徐瑞鹏。
![](data:image/png;base64,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)
T/CASAS 026—2023《碳化硅少数载流子寿命测定 微波光电导衰减法》描述了用微波光电导法测定碳化硅少数载流子寿命的方法,适用于少数载流子寿命为20 ns~200 μs的碳化硅晶片的寿命测定及质量评价。
【本文件主要起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、泰科天润半导体科技(北京)有限公司、杭州海乾半导体有限公司、安徽长飞先进半导体有限公司、中国科学院半导体研究所、中电化合物半导体有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
杨祥龙、崔潆心、彭燕、徐现刚、来玲玲、于国建、冯淦、丁雄杰、秋琪、林云昊、赵海明、钮应喜、金向军、徐瑞鹏。
![](data:image/png;base64,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)
T/CASAS 032—2023《碳化硅晶片表面金属元素含量的测定电感耦合等离子体质谱法》描述了电感耦合等离子体质谱法测定碳化硅晶片表面金属元素含量的方法。适用于碳化硅单晶抛光片和碳化硅外延片表面痕量金属钠、铝、钾、钙、钪、钛、钒、铬、锰、铁、钴、镍、铜、锌、银、钨、金、汞等元素含量的测定,测定范围为108 cm-2~1012 cm-2。适用于100 mm(4吋)~200 mm(8吋)碳化硅原生晶片、碳化硅退火片等无图形碳化硅晶片表面痕量金属元素含量的测定。
【本文件起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、泰科天润半导体科技(北京)有限公司、杭州海乾半导体有限公司、安徽长飞先进半导体有限公司、中国科学院半导体研究所、中电化合物半导体有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
崔潆心、陈秀芳、谢雪健、杨祥龙、徐现刚、来玲玲、于国建、冯淦、丁雄杰、秋琪、林云昊、赵海明、钮应喜、金向军、徐瑞鹏。
山东大学新一代半导体材料研究院是教育部首批支持的战略科技创新平台,依托山东大学开展建设。研究院充分发挥学校在半导体材料研究领域的已有优势,通过整合校内微电子、物理、化学、材料、机械、控制、信息等优势学科力量,瞄准半导体材料技术未来发展方向,面向能源、信息、国防、轨道交通等领域的重大需求,重点开展碳化硅、氮化镓、氧化镓、金刚石、氮化铝等新一代宽禁带、超宽禁带半导体单晶材料及器件研究工作,旨在突破关键核心技术,支撑核心产业发展,推动我国新一代半导体、集成电路、信息技术的快速发展,满足国防安全和经济建设的重大需求。
【本文件主要起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、绍兴中芯集成电路制造股份有限公司、泰科天润半导体科技(北京)有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
崔潆心、杨祥龙、陈秀芳、徐现刚、来玲玲、于国建、冯淦、丁雄杰、潘国卫、秋琪、徐瑞鹏。
T/CASAS 026—2023《碳化硅少数载流子寿命测定 微波光电导衰减法》描述了用微波光电导法测定碳化硅少数载流子寿命的方法,适用于少数载流子寿命为20 ns~200 μs的碳化硅晶片的寿命测定及质量评价。
【本文件主要起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、泰科天润半导体科技(北京)有限公司、杭州海乾半导体有限公司、安徽长飞先进半导体有限公司、中国科学院半导体研究所、中电化合物半导体有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
杨祥龙、崔潆心、彭燕、徐现刚、来玲玲、于国建、冯淦、丁雄杰、秋琪、林云昊、赵海明、钮应喜、金向军、徐瑞鹏。
【本文件起草单位】
山东大学、广州南砂晶圆半导体技术有限公司、瀚天天成电子科技(厦门)有限公司、广东天域半导体股份有限公司、泰科天润半导体科技(北京)有限公司、杭州海乾半导体有限公司、安徽长飞先进半导体有限公司、中国科学院半导体研究所、中电化合物半导体有限公司、北京第三代半导体产业技术创新战略联盟。
【本文件主要起草人】
崔潆心、陈秀芳、谢雪健、杨祥龙、徐现刚、来玲玲、于国建、冯淦、丁雄杰、秋琪、林云昊、赵海明、钮应喜、金向军、徐瑞鹏。
【山东大学新一代半导体材料研究院】
山东大学新一代半导体材料研究院是教育部首批支持的战略科技创新平台,依托山东大学开展建设。研究院充分发挥学校在半导体材料研究领域的已有优势,通过整合校内微电子、物理、化学、材料、机械、控制、信息等优势学科力量,瞄准半导体材料技术未来发展方向,面向能源、信息、国防、轨道交通等领域的重大需求,重点开展碳化硅、氮化镓、氧化镓、金刚石、氮化铝等新一代宽禁带、超宽禁带半导体单晶材料及器件研究工作,旨在突破关键核心技术,支撑核心产业发展,推动我国新一代半导体、集成电路、信息技术的快速发展,满足国防安全和经济建设的重大需求。
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